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Global Main Cleanroom Standards
Issuing time:2017-09-29 14:00

Cleanrooms are classified by how clean the air is, and the cleanroom standards instruct the number and size of particles permitted per volume of air. Based on the international cleanroom standard ISO14644-1, some countries has also their own standards: 209 (A-D) and 209E in USA, BS5295 in UK, and AFNORX44101 in France, VDI2083 in Germany, JACA in Japan as well etc.

Herewith the details about 3 main cleanroom standards as well as comparasion between it.

ISO 14644-1 Cleanroom Standards


Class

maximum particles/m3

FED STD 209E
equivalent

>=0.1um

>=0.2 um

>=0.3 um

>=0.5 um

>=1 um

>=5 um

ISO 1

10

2






ISO 2

100

24

10

4




ISO 3

1,000

237

102

35

8


Class 1

ISO 4

10,000

2,370

1,020

352

83


Class 10

ISO 5

100,000

23,700

10,200

3,520

832

29

Class 100

ISO 6

1,000,000

237,000

102,000

35,200

8,320

293

Class 1,000

ISO 7




352,000

83,200

2,930

Class 10,000

ISO 8




3,520,000

832,000

29,300

Class 100,000

ISO 9




35,200,000

8,320,000

293,000

Room Air


BS 5295 Cleanroom Standards


maximum particles/m3

Class

>=0.3um

>=0.5um

>=5um

>=10um

>=25um

C

100

35

0

NS

NS

D

1,000

350

0

NS

NS

E

10,000

3,500

0

NS

NS

F

NS

3,500

0

NS

NS

G

100,000

35,000

200

0

NS

H

NS

35,000

200

0

NS

J

NS

350,000

2,000

450

0

K

NS

3,500,000

20,000

4,500

500

L

NS

NS

200,000

4,500

5,000

M

NS

NS

NS

450,000

50,000


Federal Standard 209E Airborne Particulate Cleanliness Classes


maximum particles/m3

Class

>=0.1um

>=0.2um

>=0.3um

>=0.5um

>=5um

M1

350

75.7

30.9

10


M1.5

1240

265

106

35.3


M2

3500

757

309

100


M2.5

12400

2650

1060

353


M3

35000

7570

3090

1000


M3.5


26500

10600

3530


M4


75700

30900

10000


M4.5




35300

247

M5




100000

618

M5.5




353000

2470

M6




1000000

6180

M6.5




3350000

24700

M7




10000000

61800


Comparison of international standards

Country /Standard

USA

209D

USA

209E

UK BS2595

Australia AS1386

France AFNORX44101

Germany VDI.2083

ISO Standard

Issue Date

1988

1992

1989

1989

1972

1990

1997






-

0



1

M1.5

C

0.035

-

1

3


10

M2.5

D

0.35

-

2

4


100

M3.5

E or F

3.5

4000

3

5


1000

M4.5

G or H

35

-

4

6


10000

M5.5

J

350

-400000

5

7


100000

M6.5

K

3500

4000000

6

8


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