Global Main Cleanroom Standards

Issuing time:2017-09-29 14:00

Cleanrooms are classified by how clean the air is, and the cleanroom standards instruct the number and size of particles permitted per volume of air. Based on the international cleanroom standard ISO14644-1, some countries has also their own standards: 209 (A-D) and 209E in USA, BS5295 in UK, and AFNORX44101 in France, VDI2083 in Germany, JACA in Japan as well etc.

Herewith the details about 3 main cleanroom standards as well as comparasion between it.

ISO 14644-1 Cleanroom Standards

Class	maximum particles/m³						FED STD 209E equivalent
Class	>=0.1um	>=0.2 um	>=0.3 um	>=0.5 um	>=1 um	>=5 um	FED STD 209E equivalent
ISO 1	10	2
ISO 2	100	24	10	4
ISO 3	1,000	237	102	35	8		Class 1
ISO 4	10,000	2,370	1,020	352	83		Class 10
ISO 5	100,000	23,700	10,200	3,520	832	29	Class 100
ISO 6	1,000,000	237,000	102,000	35,200	8,320	293	Class 1,000
ISO 7				352,000	83,200	2,930	Class 10,000
ISO 8				3,520,000	832,000	29,300	Class 100,000
ISO 9				35,200,000	8,320,000	293,000	Room Air

BS 5295 Cleanroom Standards

	maximum particles/m³
Class	>=0.3um	>=0.5um	>=5um	>=10um	>=25um
C	100	35	0	NS	NS
D	1,000	350	0	NS	NS
E	10,000	3,500	0	NS	NS
F	NS	3,500	0	NS	NS
G	100,000	35,000	200	0	NS
H	NS	35,000	200	0	NS
J	NS	350,000	2,000	450	0
K	NS	3,500,000	20,000	4,500	500
L	NS	NS	200,000	4,500	5,000
M	NS	NS	NS	450,000	50,000

Federal Standard 209E Airborne Particulate Cleanliness Classes

	maximum particles/m³
Class	>=0.1um	>=0.2um	>=0.3um	>=0.5um	>=5um
M1	350	75.7	30.9	10
M1.5	1240	265	106	35.3
M2	3500	757	309	100
M2.5	12400	2650	1060	353
M3	35000	7570	3090	1000
M3.5		26500	10600	3530
M4		75700	30900	10000
M4.5				35300	247
M5				100000	618
M5.5				353000	2470
M6				1000000	6180
M6.5				3350000	24700
M7				10000000	61800

Comparison of international standards

Country /Standard	USA 209D	USA 209E	UK BS2595	Australia AS1386	France AFNORX44101	Germany VDI.2083	ISO Standard
Issue Date	1988	1992	1989	1989	1972	1990	1997
					-	0
	1	M1.5	C	0.035	-	1	3
	10	M2.5	D	0.35	-	2	4
	100	M3.5	E or F	3.5	4000	3	5
	1000	M4.5	G or H	35	-	4	6
	10000	M5.5	J	350	-400000	5	7
	100000	M6.5	K	3500	4000000	6	8